- ModelTRITON
- Gas Process MethodWET BURN WET
- Processing capacityMax.500LPM
- Dimension(Cabinet)900(W)X1050(D)X1850(H)
주메뉴
- TRITON
- Applying Pre-Wet Module and Maximizing PM period through solubling Gas & Powder and preprocessing
- TRITON
- It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them
Product Features
- Pre Wet System : prolong a PM period of the first water treatment
- Flame Mode as per processing step : Energy Saving
- Express Air Burner : Stable Flame Maintaining and Low NOX emission
- Scraper System : Preventing Powder accumulation
Possible processing GAS
- Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
- Water-Soluble GAS : DCS, NH3, ETC
