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GPD3000Z
GPD3000Z不使用冷冻液,冷媒直接和主设备进行热交换的冷却器
GPD3000Z
有效而稳定地调节生产半导体丶LCD及太阳能电池的主装备的周边温度

产品特点

  • 通过冷媒的湿蒸汽(潜热)热交换,体现出Wafer的温度平衡
  • 去除冷却剂管路,节省用电量 (减少50%)
  • 不需使用冷却剂,节省运行成本
  • 通过接近安装调节器,改善负荷应答性 (改善FTT/LTT)
  • 零冷冻剂消耗量,简化日常维护
  • 设有关于温度、压力、泄漏的各种安全装置

SPECIFICATION

ITEM SPECIFICATION(CHANNEL 1) SPECIFICATION(CHANNEL 2)
ITEMCooling Type SPECIFICATION(CHANNEL 1)Refrigerant Type SPECIFICATION(CHANNEL 2)Heat Exchanger
ITEMTemperature Range SPECIFICATION(CHANNEL 1)-20℃ ∼ +20℃ SPECIFICATION(CHANNEL 2)+30℃ ∼ +40℃
ITEMTemperature Stability SPECIFICATION(CHANNEL 1)±0.1 ℃ SPECIFICATION(CHANNEL 2)±0.1 ℃
ITEMCooling Capacity SPECIFICATION(CHANNEL 1)6,000W (at +0℃) SPECIFICATION(CHANNEL 2)3,000W (at +30℃)
ITEMDimensions ( mm ) SPECIFICATION(CHANNEL 1)480(W) x 960(D) x 1,600(H) SPECIFICATION(CHANNEL 2)480(W) x 960(D) x 1,600(H)
ITEMRefrigerant SPECIFICATION(CHANNEL 1)R-404a SPECIFICATION(CHANNEL 2)N/A
ITEMCoolant SPECIFICATION(CHANNEL 1)N/A SPECIFICATION(CHANNEL 2)Galden, Fluorinert
ITEMCommunication SPECIFICATION(CHANNEL 1)RS422, Dry Contact(TEL) SPECIFICATION(CHANNEL 2)RS422, Dry Contact(TEL)
ITEMVaccum Pump SPECIFICATION(CHANNEL 1)0.4 kW SPECIFICATION(CHANNEL 2)N/A
ITEMFlow Rate SPECIFICATION(CHANNEL 1)N/A SPECIFICATION(CHANNEL 2)Max.25 LPM
ITEMWeight SPECIFICATION(CHANNEL 1)280kg SPECIFICATION(CHANNEL 2)280kg
ITEMFacility Cooling Water SPECIFICATION(CHANNEL 1)20±2℃, 30LPM, 3kg/㎠ SPECIFICATION(CHANNEL 2)20±2℃, 30LPM, 3kg/㎠
ITEMElectric Power SPECIFICATION(CHANNEL 1)3Φ, 200/220V, 50/60Hz (Breaker 30A SPECIFICATION(CHANNEL 2)3Φ, 200/220V, 50/60Hz (Breaker 30A)