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home > Equipment Division > CHILLER > Direct Chiller > GPD3000Z
GPD3000Z
GPD3000Z is a Chiller. Its refrigerants can directly transfer heat with main equipment not using Coolant
GPD3000Z
It is an equipment which improves processing efficiency by controllng the temperature
of Chamber periphery of main equipment in the process of semiconductor, Display, LED and solar battery

Product Features

  • Temperature equalization with heat transfer of refrigeant wet steam
  • Reduction of power consumption with deleting Coolant Line(up to 50%)
  • Reduction of Operation expenses with not using Coolant
  • Improve Load Response Ability with proximate harness install (enhance FTT/LTT)
  • Simplicate Maintenance with Zero consumption of Coolant
  • Various types of Interlocks about temperature, pressure and leak applied

SPECIFICATION

ITEM SPECIFICATION(CHANNEL 1) SPECIFICATION(CHANNEL 2)
ITEMCooling Type SPECIFICATION(CHANNEL 1)Refrigerant Type SPECIFICATION(CHANNEL 2)Heat Exchanger
ITEMTemperature Range SPECIFICATION(CHANNEL 1)-20℃ ∼ +20℃ SPECIFICATION(CHANNEL 2)+30℃ ∼ +40℃
ITEMTemperature Stability SPECIFICATION(CHANNEL 1)±0.1 ℃ SPECIFICATION(CHANNEL 2)±0.1 ℃
ITEMCooling Capacity SPECIFICATION(CHANNEL 1)6,000W (at +0℃) SPECIFICATION(CHANNEL 2)3,000W (at +30℃)
ITEMDimensions ( mm ) SPECIFICATION(CHANNEL 1)480(W) x 960(D) x 1,600(H) SPECIFICATION(CHANNEL 2)480(W) x 960(D) x 1,600(H)
ITEMRefrigerant SPECIFICATION(CHANNEL 1)R-404a SPECIFICATION(CHANNEL 2)N/A
ITEMCoolant SPECIFICATION(CHANNEL 1)N/A SPECIFICATION(CHANNEL 2)Galden, Fluorinert
ITEMCommunication SPECIFICATION(CHANNEL 1)RS422, Dry Contact(TEL) SPECIFICATION(CHANNEL 2)RS422, Dry Contact(TEL)
ITEMVaccum Pump SPECIFICATION(CHANNEL 1)0.4 kW SPECIFICATION(CHANNEL 2)N/A
ITEMFlow Rate SPECIFICATION(CHANNEL 1)N/A SPECIFICATION(CHANNEL 2)Max.25 LPM
ITEMWeight SPECIFICATION(CHANNEL 1)280kg SPECIFICATION(CHANNEL 2)280kg
ITEMFacility Cooling Water SPECIFICATION(CHANNEL 1)20±2℃, 30LPM, 3kg/㎠ SPECIFICATION(CHANNEL 2)20±2℃, 30LPM, 3kg/㎠
ITEMElectric Power SPECIFICATION(CHANNEL 1)3Φ, 200/220V, 50/60Hz (Breaker 30A SPECIFICATION(CHANNEL 2)3Φ, 200/220V, 50/60Hz (Breaker 30A)