주메뉴
- P-TOM
- P-TOM is a Heat transfer typed Chiller available for settling with Main Equipment due to reducing Size of equipment through optimal design of Chiller
- P-TOM
- It is an equipment which improves processing efficiency by controllng the temperature
of Chamber periphery of main equipment in the process of semiconductor, Display, LED and solar battery
Product Features
- Improve Load Response Ability with proximate installation (enhance FTT/LTT)
- Reducing watthour meter with applying load-variable typed pump (BLDC Type)
- Reducing Equipment Size with optimal design
- Reduction of Operation Expenses with low Brine usage and PCW usage
- All-in-one Concept of Machine and Controller
- Various types of Interlocks about temperature, pressure and leak applied
SPECIFICATION
| ITEM | SPECIFICATION(CHANNEL 1) |
|---|---|
| ITEMCooling Type | SPECIFICATION(CHANNEL 1)Heat Exchanger |
| ITEMTemperature Range | SPECIFICATION(CHANNEL 1)+30℃ ∼ +90℃ |
| ITEMTemperature Stability | SPECIFICATION(CHANNEL 1)±0.1℃ |
| ITEMCooling Capacity | SPECIFICATION(CHANNEL 1)8,000W (at+50℃) |
| ITEMDimensions (mm) | SPECIFICATION(CHANNEL 1)240(W) x 425(D) x 530(H) |
| ITEMCommunication | SPECIFICATION(CHANNEL 1)User Option |
| ITEMFlow Rate | SPECIFICATION(CHANNEL 1)20LPM (at 0.5 Mpa) |
| ITEMRefrigerant | SPECIFICATION(CHANNEL 1)- |
| ITEMCoolant | SPECIFICATION(CHANNEL 1)Galden, Fluorinert |
| ITEMWeight | SPECIFICATION(CHANNEL 1)80 kg |
| ITEMElectric Power | SPECIFICATION(CHANNEL 1)3Φ, 200/208V, 50/60Hz (Breaker 20A) |
| ITEMFacility Cooling Water | SPECIFICATION(CHANNEL 1)20±2℃, 10LPM, 3kg/㎠ |
