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home > Equipment Division > SCRUBBER > BURN TYPE > UN2005A-PL/PLD
UN2005A-PL/PLD
Bulk Burn-Wet Scrubber avaiable for processing a large amounts of Gas
  • ModelUN2005A-PL/PLD
  • Gas Process MethodBulk BURN WET
  • Processing capacityMax.1500LPM(Based on single)
  • Dimension(Cabinet)1200(W)X1100(D)X1700(H)_UN2005A-PL / 1500(W)X1300(D)X1850(H)_UN2005A-PLD
UN2005A-PL/PLD
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.

Product Features

  • Available Bulk Processing Capacity (UP TO 1,500 LPM)
  • Dual System : Reduce Down-Time of equipment with interworking
  • Easy Maintenance, Easy PM, Cylinder Type

Possible processing GAS

  • PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
  • Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
  • Water-Soluble GAS : Cl2, HF, HCl, NH3, ETC