- ModelATOM1000S
- Gas Process MethodPLASMA WET
- Processing capacity300LPM
- Dimension(Cabinet)800(W)X800(D)X1720(H)
주메뉴
- ATOM1000S
- Plasma-Wet Scrubber responding to semiconductor
- ATOM1000S
- It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.
Product Features
- High Temperature Heat Equilibrium Plasma
- High Decomposition Efficiency of PFC Gas(99%)
- PFCs GAS Processing Unit using high-temperature Plasma ARC, not the second heat source(LNG, LPG, etc.)
Possible processing GAS
- PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
- Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
- Water-Soluble GAS : Cl2, HF, HCl, NH3, ETC
