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Equipment Division
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> Equipment Division > SCRUBBER > HEATER TYPE > UN2000A-BW
BURN TYPE
TRITON
UN2005A-PL/PLD
ECOBRID1000/2000
NECA4000
PLASMA TYPE
ATOM1000S
ATOM1000L
HEATER TYPE
UN2000A-BW
MAGMA1000
MAGMA3000
DRY TYPE
ARENS
ETC
W3000
UN2000A-DC
UN2000A-BW
Heat-Wet Scrubber responding to semiconductor
Model
UN2000A-BW
Gas Process Method
HEAT WET
Processing capacity
300LPM
Dimension(Cabinet)
850(W)X900(D)X1750(H)
UN2000A-BW
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.
Product Features
Dry system : Minimalizing water emission applied
Flammable & Water-Soluble GAS processing with using high-temperature Heater
Reasonable operation expenses compared to Burn ot Plasma Type
Possible processing GAS
PFC GAS : NF3
Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
Water-Soluble GAS : Cl2, HF, HCl, NH3, ETC