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home > Equipment Division > SCRUBBER > BURN TYPE > ECOBRID1000/2000
ECOBRID1000/2000
Nox Free Scrubber which can reduce emissions such as Nox, THC, etc.
  • Model1000/2000_Nox Free
  • Gas Process MethodBURN WET
  • Processing capacityMax.500LPM(Based on single)
  • Dimension(Cabinet)750(W)X850(D)X1800(H)_ECOBRID1000 / 1200(W)X1000(D)X1800(H)_ECOBRID2000
ECOBRID1000/2000
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.

Product Features

  • Low NOX Burner : Reducing NOX, THC emissions(NOX Free)
  • High processing efficiency of Flammable & Water-Soluble & PFC Gas
  • Easy Maintenance, Easy PM, Cylinder Type

Possible processing GAS

  • PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
  • Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
  • Water-Soluble GAS : Cl2, HF, HCl, NH3, ETC