- ModelNECA4000
- Gas Process MethodBURN WET (Box Type)
- Processing capacityMax.6000LPM
- Dimension(Cabinet)1800(W)X1300(D)X1800(H)
주메뉴
- NECA4000
- Bulk Burn-Box Type for Display Process (No Water Consumption)
- NECA4000
- It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.
Product Features
- Available Bulk Processing Capacity (UP TO 1,500 LPM)
- High processing efficiency of Flammable & Water-Soluble & PFC Gas
- Reducing UT : Not using CW
- Easy Maintenance, Easy PM, Cylinder Type
Possible processing GAS
- PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
- Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
