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home > Equipment Division > SCRUBBER > ETC > UN2000A-DC
UN2000A-DC
Absorption typed Dry Scrubber
  • ModelUN2000A-DC
  • Gas Process MethodAbsorption
  • Processing capacity1500LPM
  • Dimension(Cabinet)850(W)X850(D)X1750(H)
UN2000A-DC
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.

Product Features

  • Efficient Decomposition using RESIN
  • Efficient Bulk Gas Processing

Possible processing GAS

  • Metal Etch : BCl3, Cl2, HCl, ETC
  • Implant : BF3, PH3, ETC