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home > Equipment Division > SCRUBBER > HEATER TYPE > MAGMA1000
MAGMA1000
Heat-Wet Scrubber responding to semiconductor and display
  • ModelMAGMA1000
  • Gas Process MethodHEAT WET
  • Processing capacity600LPM
  • Dimension(Cabinet)800(W)X1150(D)X1600(H)
MAGMA1000
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.

Product Features

  • Processing Unit suitable for Display CVD process
  • Flammable & Water-Soluble GAS processing with using high-temperature Heater
  • Reasonable operation expenses compared to Burn ot Plasma Type

Possible processing GAS

  • PFC GAS : NF3
  • Flammable GAS : PH3, ETC
  • Water-Soluble GAS : Cl2, HF, HCl, NH3, ETC