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home > Equipment Division > SCRUBBER > DRY TYPE > ARENS
ARENS
Resin Scrubber with Dry Type
  • ModelARENS
  • Gas Process MethodResin(chemicals)
  • Processing capacity200LPM
  • Dimension(Cabinet)870(W)X850(D)X1700(H)
ARENS
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.

Product Features

  • Absorbing Target Gas efficiently using Resin
  • Not using CW(Reducing UT)
  • Externally detached structure of Powder Trap

Possible processing GAS

  • Metal Etch : BCl3, Cl2, HCl, ETC
  • Implant : BF3, PH3, ETC