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home > Equipment Division > SCRUBBER > HEATER TYPE > MAGMA3000
MAGMA3000
Bulk Heat-Wet Scrubber responding to LED, LCD
  • ModelMAGMA3000
  • Gas Process MethodHEAT WET
  • Processing capacity1500LPM
  • Dimension(Cabinet)1280(W)X1300(D)X1850(H)
MAGMA3000
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.

Product Features

  • Processing Unit suitable for Display CVD process
  • Flammable & Water-Soluble GAS processing with using high-temperature Heater
  • Reasonable operation expenses compared to Burn ot Plasma Type

Possible processing GAS

  • PFC GAS : NF3
  • Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
  • Water-Soluble GAS : Cl2, HF, HCl, NH3, ETC